دانلود کتاب ساخت در مقیاس میکرو و نانو و سیستم‌های میکرو-الکترو-مکانیکی

Micro electro mechanical systems (MEMS) utilize semiconductor processing capabilities to miniaturize and integrate traditional electromechanical systems. The dimensions of MEMS devices typically range from submicron to hundreds of microns. In recent times, MEMS technology has been widely used in the manufacture of microsensors and microactuators, finding applications in areas such as healthcare, sports, environmental testing, leisure, and entertainment. It has also shown significant commercial potential in smart electronic terminals, portable wearable devices, smart homes, and other areas. Many universities in China offer MEMS courses at both undergraduate and postgraduate levels. However, the teaching methods often depend on the instructors’ individual lesson plans or textbooks authored abroad. This situation can affect the consistency and understanding of the knowledge imparted. Additionally, there is a lack of textbooks that cover MEMS processing principles, example processes, and the latest research and development status. This book incorporates the latest MEMS research findings from both China and abroad, explaining the microprocessing techniques related to bulk silicon and surface silicon. It also introduces microprocessing methods involving non-silicon materials and includes a wide range of process applications and cutting-edge research results. The main aim of this book is to help students understand and master this complex field. This book prioritizes a systematic introduction, logical consistency, comprehensiveness, and adaptability in its content and chapter organization. It aims to spark students’ passion for learning and seeks to expand their professional perspectives. The editors express their sincere appreciation for the completion of this book through the support of the New Engineering series of distinguished textbooks project at Dalian University of Technology and the “Top Innovative Talents Training Quality Improvement Plan of Dalian University of Technology—Core Textbook Development Project for Postgraduates”.