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Atoms and molecules are the smallest units of substances. To understand the principles of micro- and nanofabrication, it is important to go back to the scales as small as molecules and atoms of physical and chemical phenomena. The purpose of this book is to describe the physical and chemical principles of micro- and nanofabrication based on the concept of using gas molecules as a “processing tool.” The book will be useful for undergraduates and graduates of chemistry, materials science, mechanical engineering, and electronic engineering, as well as young researchers and engineers who have just become a part of this field. Numerous novel technologies have been developed and re- searches have been done for micro- and nanoprocessing. From a practical point of view, however, thin-film dry processing is the sole technology that has been used in manufacturing so far. Thin-film dry processing is essential in fabricating modern advanced devices, such as integrated circuits, storage devices, flat displays, and sensors, that involve a wide range of study areas, including mechanical engineering, precision engineering, electronics, chemistry, physics, and materials manufacturing. Thin-film processing finds wide applications and is the basic technology to realize novel devices such as micromachines / microelectromechanical systems (MEMS), and medical chips. It is obvious that the science and techniques of thin-film processing are noteworthy subjects to be learned over time.